Glow Discharge Processes
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Glow Discharge Processes Description
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practi
Details
| OPC | P87SMRK |
|---|---|
| Codes | 047107828X (ISBN-10) |
| 9780471078289 (ISBN) |
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